Polska Metrologia II – Aparatura Technologiczna i badawcza

Wzorzec rezystancji z półprzewodników półmagnetycznych

powrót do strony Polska Metrologia II

1. Growth facilities → Virtual tour of the clean room facility #2

• Dual growth chamber MBE system (EPI/PREVAC) for IV- and VI-chalcogenides (Te, Se) located in Clean Room Facility #1. → see a photo
• State of the art dual growth chamber GENxplor MBE system (from VEECO) (for II-VIs, IV-VI topological crystalline insulators, semiconductor/ferromagnet and semiconductor/superconductor hybrids).  Virtual tour of the MBE Lab in the clean room facility #2. → see a photo
• Atomic Layer Deposition (ALD) – Remote plasma & thermal ALD (FlexAL Oxford Instruments) metals and ferromagnets. Virtual tour of the ALD Lab. → see a photo

2. Equipment for nanostructurization of materials (including topological matter) and fabrication of prototype devices:

• Photolithography (Mask Aligner MJB4 UV250/300/400 from SUSS MicroTec). Virtual tour of the photolithography Lab.→ see a photo
• Reactive Ion Etching – Inductive Coupled Plasma (ICP-RIE) Source (Chlorine) and ICP-RIE with deposition PECVD (Fluorine) (Double PlasmaPro 100 Cobra from Oxford Instruments). Virtual tour of the ICP-RIE/PECVD Lab. → see a photo

Equipment for characterisation and advanced studies of materials (including topological matter) and devices:

• Dry Dilution Refrigerator – Triton 400 Oxford Instruments (temperature range: without magnet: 10 mK – 300 K, with vector magnet (6×1×1 T): 10 mK- 30 K. Virtual tour of the Lab with dilution refrigerator → see a photo.
• Cathodoluminescence system (for visible and NIR light emission) and electron beam induced current (EBIC) down to 5 K (based on Carl Zeiss EVO HD15 scanning electron microscope). Virtual tour of the cathodoluminescence Lab., → see a photo
• Scanning electron microscope (SEM) with FIB and energy dispersive X-ray spectroscopy (EDS) (Carl Zeiss Auriga – CrossBeam Workstation with Bruker EDS ) (Ion imaging resolution of 2.5 nm at 30 kV, electron imaging resolution 1 nm at 15 kV). Virtual tour of the SEM/FIB Lab., → see a photo
• Systems for electrical and heat transport characterization and advanced studies, based on liquid ³He cryostats, temperatures down to 300 mK (with ³He Heliox from Oxford Instruments), magnetic fields up to 15 T. Virtual tour of the Faraday cage with ³He cryostat. →  see a photo
• Dry system for variable temperature and magnetic field studies of materials (electrical transport, inverse spin Hall effect, global broad band spin wave spectroscopy up to 20 GHz) in temperatures down to 2 K and magnetic fields up to 9 T) (from Quantum Design) Virtual tour of the Lab with the Quantum Design system. → see a photo
• Two SQUID magnetometers Quantum Design MPMS XL, 1.9 – 400 K (800 K with added apparatus), up to 5 T in AC, DC, RSO modes.